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Deposition of thin films
Atomic Layer Deposition
Combinatorial sputtering
Characterisation of thin films
In Situ Characterisation
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Thin film batteries
Thin film solar cells
Non-volatile memories
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CoCooN
Conformal Coating of Nanomaterials
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research group NB-Photonics
Research group Physics and Chemistry of Nanostructures Group
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Recent publications from CoCooN
The transformation behaviour of “alucones”, deposited by molecular layer deposition, in nanoporous Al2O3 layers
K. Van de Kerckhove; ïssaK.S. Barr; L. Santinacci; P.M. Vereecken; J. Dendooven; C. Detavernier
Dalton Transactions,
(2018) 5860 - 5870
Annealing of thin “Tincone” films, a tin-based hybrid material deposited by molecular layer deposition, in reducing, inert, and oxidizing atmospheres
K. Van de Kerckhove; J. Dendooven; C. Detavernier
Journal of Vacuum Science & Technology A,
36
(2018) 051506
Plasma enhanced atomic layer deposition of aluminum sulfide thin films
J. Kuhs; Z. Hens; C. Detavernier
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,
36
(2018) 01A113
Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
T. Dobbelaere; F. Mattelaer; P.M. Vereecken; C. Detavernier
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,
35
(2017) 041513
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