Thermal and plasma enhanced ALD on powders

The number of possible applications for nanoparticles has strongly increased in the last decade. For many applications, nanoparticles with different surface and bulk properties are necessary. A popular surface modification technique is coating the particle surface with a nanometer thick layer. Because of its atomic level precision and excellent conformality, ALD is an excellent technique for depositing ultrathin and conformal coatings onto powders and particles.

For a review on reactor concepts for powder ALD, including a dedicated reactor for plasma enhanced ALD onto particles that was developed by the CoCooN group, see Longrie et al., Journal of Vacuum Science & Technology A 32, 010802 (2014).


An example of a conformal ALD deposition on powders.

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