Synchrotron based in situ characterization during atomic layer deposition

Publication Type:

Journal Article

Source:

2014 IEEE 12th International Conference on Solid -State and Integrated Circuit Technology (ICSICT)2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) (2014)

ISBN:

978-1-4799-3296-2

URL:

http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7021174http://xplorestaging.ieee.org/iel7/7001798/7021153/07021174.pdf?arnumber=7021174
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