Annealing of thin “Tincone” films, a tin-based hybrid material deposited by molecular layer deposition, in reducing, inert, and oxidizing atmospheres

Publication Type:

Journal Article

Authors:

Van de Kerckhove, Kevin; Dendooven, Jolien; Detavernier, Christophe

Source:

Journal of Vacuum Science & Technology A, Volume 36, Issue 5, p.051506 (2018)

URL:

http://avs.scitation.org/doi/10.1116/1.5038867http://avs.scitation.org/doi/pdf/10.1116/1.5038867

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