Journal papers

Found 191 results
Author Title Type [ Year(Asc)]
2015
Atomic layer deposition of ruthenium at 100 °C using the RuO4-precursor and H2, Minjauw, Matthias M., Dendooven Jolien, Capon Boris, Schaekers Marc, and Detavernier Christophe , J. Mater. Chem. C, Jan-01-2015, Volume 3, Issue 1, p.132 - 137, (2015)
Combinatorial Study of Ag-Te Thin Films and Their Application as Cation Supply Layer in CBRAM Cells, Devulder, Wouter, Opsomer Karl, Meersschaut Johan, Deduytsche Davy, Jurczak Malgorzata, Goux Ludovic, and Detavernier Christophe , ACS COMBINATORIAL SCIENCE, 05/2015, Volume 17, p.334-340, (2015)
Deposition of MnO Anode and MnO 2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd) 3 Precursor, Mattelaer, Felix, Vereecken Philippe M., Dendooven Jolien, and Detavernier Christophe , Chemistry of Materials, Feb-05-2017, Volume 27, Issue 10, p.3628 - 3635, (2015)
Improved thermal stability and retention properties of Cu-Te based CBRAM by Ge alloying, Devulder, Wouter, Opsomer Karl, Rampelberg Geert, De Schutter Bob, Devloo-Casier Kilian, Jurczak Malgorzata, Goux Ludovic, and Detavernier Christophe , J. Mater. Chem. C, Volume 3, p.12469-12476, (2015)
In situ X-ray diffraction study of the controlled oxidation and reduction in the V–O system for the synthesis of VO2 and V2O3 thin films, Rampelberg, Geert, De Schutter Bob, Devulder Wouter, Martens Koen, Radu Iuliana, and Detavernier Christophe , J. Mater. Chem. C, Jan-01-2015, Volume 3, Issue 43, p.11357 - 11365, (2015)
Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films, Ramachandran, Ranjith K., Dendooven Jolien, Poelman Hilde, and Detavernier Christophe , The Journal of Physical Chemistry C, Apr-05-2017, Volume 119, Issue 21, p.11786 - 11791, (2015)
Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO 4 -precursor and H 2 -plasma, Minjauw, Matthias M., Dendooven Jolien, Capon Boris, Schaekers Marc, and Detavernier Christophe , J. Mater. Chem. C, Jan-01-2015, Volume 3, Issue 19, p.4848 - 4851, (2015)
Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene, Roy, Amit K., Dendooven Jolien, Deduytsche Davy, Devloo-Casier Kilian, Ragaert Kim, Cardon Ludwig, and Detavernier Christophe , Chem. Commun., Jan-01-2015, (2015)
Porous nanostructured metal oxides synthesized through atomic layer deposition on a carbonaceous template followed by calcination, Deng, Shaoren, Kurttepeli Mert, Cott Daire J., Bals Sara, and Detavernier Christophe , J. Mater. Chem. A, Jan-01-2015, Volume 3, Issue 6, p.2642 - 2649, (2015)
Visualization and classification of epitaxial alignment at hetero-phase boundaries, De Schutter, B., De Keyser K., and Detavernier C. , Thin Solid Films, Jan-12-2015, (2015)
2014
Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate, Dobbelaere, Thomas, Roy Amit K., Vereecken, Philippe, and Detavernier Christophe , Chemistry of Materials, Volume 26, Issue 23, p.6863-6871, (2014)
Atomic layer deposition-based synthesis of photoactive TiO2 nanoparticle chains by using carbon nanotubes as sacrificial templates, Deng, Shaoren, Verbruggen Sammy W., He Zhanbing, Cott Daire J., Vereecken Philippe M., Martens Johan A., Bals Sara, Lenaerts Silvia, and Detavernier Christophe , RSC Advances, Jan-01-2014, Volume 4, Issue 23, p.11648, (2014)
Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle x-ray scattering, Dendooven, Jolien, Devloo-Casier Kilian, Ide Matthias, Grandfield Kathryn, Kurttepeli Mert, Ludwig Karl, Bals Sara, Van Der Voort Pascal, and Detavernier Christophe , Nanoscale, Jan-01-2014, (2014)
Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing, Deng, Shaoren, Verbruggen Sammy W., Lenaerts Silvia, Martens Johan A., Van den Berghe Sven, Devloo-Casier Kilian, Devulder Wouter, Dendooven Jolien, Deduytsche Davy, and Detavernier Christophe , Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Jan-01-2014, Volume 32, Issue 1, p.01A123, (2014)
Crystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer deposition, Rampelberg, Geert, Deduytsche Davy, De Schutter Bob, Premkumar Peter Antony, Toeller Michael, Schaekers Marc, Martens Koen, Radu Iuliana, and Detavernier Christophe , Thin Solid Films, Jan-01-2014, Volume 550, p.59 - 64, (2014)
On the formation and structural properties of hexagonal rare earth (Y, Gd, Dy, Er and Yb) disilicide thin films, Geenen, F.A., Knaepen W., Demeulemeester J., De Keyser K., Jordan-Sweet J.L., Lavoie C., Vantomme A., and Detavernier C. , Journal of Alloys and Compounds, Jan-10-2014, Volume 611, p.149 - 156, (2014)
Formation and texture of palladium germanides studied by in situ X-ray diffraction and pole figure measurements, Geenen, F. A., Knaepen W., Keyser De K., Opsomer K., Vanmeirhaeghe R. L., Jordan-Sweet J., Lavoie C., and Detavernier Christophe , Thin Solid Films, Volume 551, p.86 - 91, (2014)
In Situ IR Spectroscopic Investigation of Alumina ALD on Porous Silica Films: Thermal versus Plasma-Enhanced ALD, Levrau, Elisabeth, Van de Kerckhove Kevin, Devloo-Casier Kilian, Sree Sreeprasanth Pulinthana, Martens Johan A., Detavernier Christophe, and Dendooven Jolien , The Journal of Physical Chemistry C, Feb-12-2016, Volume 118, Issue 51, p.29854 - 29859, (2014)
In situ synchrotron based x-ray techniques as monitoring tools for atomic layer deposition, Devloo-Casier, Kilian, Ludwig Karl F., Detavernier Christophe, and Dendooven Jolien , Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Jan-01-2014, Volume 32, Issue 1, p.010801, (2014)
Influence of carbon content on the copper-telluride phase formation and on the resistive switching behavior of carbon alloyed Cu-Te conductive bridge random access memory cells, Devulder, Wouter, Opsomer Karl, Franquet Alexis, Meersschaut Johan, Belmonte Attilio, Muller Robert, De Schutter Bob, Van Elshocht Sven, Jurczak Malgorzata, Goux Ludovic, et al. , Journal of Applied Physics, Jul-02-2014, Volume 115, Issue 5, p.054501, (2014)
Phase formation in intermixed Ni–Ge thin films: Influence of Ge content and low-temperature nucleation of hexagonal nickel germanides, De Schutter, B., Devulder W., Schrauwen A., van Stiphout K., Perkisas T., Bals S., Vantomme A., and Detavernier C. , Microelectronic Engineering, Jan-05-2014, Volume 120, p.168 - 173, (2014)
Plasma enhanced atomic layer deposition of Ga 2 O 3 thin films, Ramachandran, Ranjith K., Dendooven Jolien, Botterman Jonas, Sree Sreeprasanth Pulinthana, Poelman Dirk, Martens Johan A., Poelman Hilde, and Detavernier Christophe , J. Mater. Chem. A, Jan-01-2014, (2014)
Reactor concepts for atomic layer deposition on agitated particles: A review, Longrie, Delphine , Journal of Vacuum Science & Technology A, 12/2014, Volume 32, (2014)
Synchrotron based in situ characterization during atomic layer deposition, Dendooven, J., Devloo-Casier K., Coati A., Portale G., Bras W., Ludwig K., and Detavernier C. , 2014 IEEE 12th International Conference on Solid -State and Integrated Circuit Technology (ICSICT)2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), (2014)
Synthesis of a 3D network of Pt nanowires by atomic layer deposition on a carbonaceous template, Deng, Shaoren, Kurttepeli Mert, Deheryan Stella, Cott Daire J., Vereecken Philippe M., Martens Johan A., Bals Sara, van Tendeloo Gustaaf, and Detavernier Christophe , Nanoscale, Jan-01-2014, Volume 6, Issue 12, p.6939, (2014)

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