Journal papers

Found 2 results
Author Title Type [ Year(Asc)]
Filters: Author is Jakob Kuhs  [Clear All Filters]
2018
Plasma enhanced atomic layer deposition of aluminum sulfide thin films, Kuhs, Jakob, Hens Zeger, and Detavernier Christophe , Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Volume 36, p.01A113, (2018)
2017
Plasma enhanced atomic layer deposition of zinc sulfide thin films, Kuhs, Jakob, Dobbelaere Thomas, Hens Zeger, and Detavernier Christophe , Journal of Vacuum Science & Technology A, Volume 35, Issue 1, (2017)
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