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Synchrotron based in situ characterization during atomic layer deposition, Dendooven, J., Devloo-Casier K., Coati A., Portale G., Bras W., Ludwig K., and Detavernier C. , 2014 IEEE 12th International Conference on Solid -State and Integrated Circuit Technology (ICSICT)2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), (2014)
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