Journal papers

Found 3 results
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Filters: Author is Devloo-Casier, K.  [Clear All Filters]
Synchrotron based in situ characterization during atomic layer deposition, Dendooven, J., Devloo-Casier K., Coati A., Portale G., Bras W., Ludwig K., and Detavernier C. , 2014 IEEE 12th International Conference on Solid -State and Integrated Circuit Technology (ICSICT)2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), (2014)
Plasma-Enhanced ALD of Platinum with O2, N2 and NH3 Plasmas, Longrie, D., Devloo-Casier K., Deduytsche D., Van den Berghe S., Driesen K., and Detavernier Christophe , ECS Journal of Solid State Science and Technology, 01/2012, Volume 1, Issue 6, p.Q123 - Q129, (2012)
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