Journal papers

Found 28 results
Author Title Type [ Year(Asc)]
Filters: Author is D Deduytsche  [Clear All Filters]
2012
Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate, Musschoot, J., Dendooven J., Deduytsche D., Haemers J., Buyle G., and Detavernier Christophe , Surface and Coatings Technology, 6/2012, Volume 206, Issue 22, p.4511 - 4517, (2012)
Plasma-Enhanced ALD of Platinum with O2, N2 and NH3 Plasmas, Longrie, D., Devloo-Casier K., Deduytsche D., Van den Berghe S., Driesen K., and Detavernier Christophe , ECS Journal of Solid State Science and Technology, 01/2012, Volume 1, Issue 6, p.Q123 - Q129, (2012)
2011
Aluminium atomic layer deposition applied to mesoporous zeolites for acid catalytic activity enhancement, Pulinthanathu Sree, S., Dendooven J., Koranyi T. I., Vanbutsele G., Houthoofd K., Deduytsche D., Detavernier Christophe, and Martens JA , Catalysis Science & Technology, 2011, Volume 1, Issue 2, p.218 - 221, (2011)
Effective Electrical Passivation of Ge(100) for HfO2 Gate Dielectric Layers Using O-2 Plasma, Xie, Q., Deduytsche D., Schaekers M., Caymax M., Delabie A., Qu X. P., and Detavernier Christophe , Electrochemical and Solid State Letters, Volume 14, Number 5, p.G20-G22, (2011)
In Situ X-ray Fluorescence Measurements During Atomic Layer Deposition: Nucleation and Growth of TiO2 on Planar Substrates and in Nanoporous Films, Dendooven, J., Sree SP, De Keyser K., Deduytsche D., Martens JA, Ludwig KF, and Detavernier Christophe , Journal of Physical Chemistry C, Apr 14, Volume 115, Number 14, p.6605-6610, (2011)
Spacious and mechanically flexible mesoporous silica thin film composed of an open network of interlinked nanoslabs, Pulinthanathu Sree, S., Dendooven J., Smeets D., Deduytsche D., Aerts A., Vanstreels K., Baklanov M. R., Seo J. W., Temst K., Vantomme A., et al. , Journal of Materials Chemistry, 2011, Volume 21, Issue 21, p.7692 - 7699, (2011)
TaCN growth with PDMAT and H-2/Ar plasma by plasma enhanced atomic layer deposition, Xie, Q., Deduytsche D., Musschoot J., Vanmeirhaeghe R. L., Detavernier Christophe, Ding S. F., and Qu X. P. , Microelectronic Engineering, May, Volume 88, Number 5, p.646-650, (2011)
2008
Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N-2 or NH3 plasma, Xie, Q., Musschoot J., Detavernier Christophe, Deduytsche D., Vanmeirhaeghe R. L., Van den Berghe S., Jiang Y. L., Ru G. P., Li B. Z., and Qu X. P. , Microelectronic Engineering, Oct, Volume 85, Number 10, p.2059-2063, (2008)
Effect of Pt addition on growth stress and thermal stress of NiSi films, Van Bockstael, C., De Keyser K., Deduytsche D., Vanmeirhaeghe R. L., Detavernier Christophe, Jordan-Sweet J. L., and Lavoie C. , Journal of Applied Physics, Sep 1, Volume 104, Number 5, p.-, (2008)
Formation and stability of NiSi in the presence of Co and Fe alloying elements, Deduytsche, D., Detavernier Christophe, Vanmeirhaeghe R. L., Jordan-Sweet J. L., and Lavoie C. , Journal of Vacuum Science & Technology B, Nov, Volume 26, Number 6, p.1971-1977, (2008)
Growth kinetics and crystallization behavior of TiO2 films prepared by plasma enhanced atomic layer deposition, Xie, Q., Musschoot J., Deduytsche D., Vanmeirhaeghe R. L., Detavernier Christophe, Van den Berghe S., Jiang Y. L., Ru G. P., Li B. Z., and Qu X. P. , Journal of the Electrochemical Society, Volume 155, Number 9, p.H688-H692, (2008)
Nucleation and diffusion during growth of ternary Co1-xNixSi2 thin films studied by complementary techniques in real time, Smeets, D., Demeulemeester J., De Keyser K., Deduytsche D., Detavernier Christophe, Comrie C. M., Theron C. C., Lavoie C., and Vantomme A. , Journal of Applied Physics, Nov 1, Volume 104, Number 9, p.-, (2008)
Simultaneous real-time x-ray diffraction spectroscopy, Rutherford backscattering spectrometry, and sheet resistance measurements to study thin film growth kinetics by Kissinger plots, Smeets, D., Demeulemeester J., Deduytsche D., Detavernier Christophe, Comrie C. M., Theron C. C., Lavoie C., and Vantomme A. , Journal of Applied Physics, Nov 15, Volume 104, Number 10, p.-, (2008)

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