Journal papers

Found 6 results
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Filters: Author is Van Elshocht, S.  [Clear All Filters]
Composition influence on the physical and electrical properties of SrxTi1-xOy-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes, Menou, N., Popovici M., Clima S., Opsomer K., Polspoel W., Kaczer B., Rampelberg G., Tomida K., Pawlak M. A., Detavernier Christophe, et al. , Journal of Applied Physics, Nov 1, Volume 106, Number 9, p.-, (2009)
Crystallization resistance of barium titanate zirconate ultrathin films from aqueous CSD: a study of cause and effect, Hardy, A., Van Elshocht S., Knaepen W., D'Haen J., Conard T., Brijs B., Vandervorst W., Pourtois G., Kittl J., Detavernier Christophe, et al. , Journal of Materials Chemistry, Volume 19, Number 8, p.1115-1122, (2009)
Growth and Material Characterization of Hafnium Titanates Deposited by Atomic Layer Deposition, Popovici, M., Delabie A., Van Elshocht S., Clima S., Pourtois G., Nyns L., Tomida K., Menou N., Opsomer K., Swerts J., et al. , Journal of the Electrochemical Society, Volume 156, Number 10, p.G145-G151, (2009)
High-k dielectrics for future generation memory devices (Invited Paper), Kittl, J. A., Opsomer K., Popovici M., Menou N., Kaczer B., Wang X. P., Adelmann C., Pawlak M. A., Tomida K., Rothschild A., et al. , Microelectronic Engineering, Jul-Sep, Volume 86, Number 7-9, p.1789-1795, (2009)
Interdiffusion and crystallization in HfO2/Al2O3 superlattices, Adelmann, C., Kesters J., Opsomer K., Detavernier Christophe, Kittl J. A., and Van Elshocht S. , Applied Physics Letters, Aug 31, Volume 95, Number 9, p.-, (2009)
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